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Applied Materials® Centura® 5200 (3x WxZ, 1x HeWeB)
Make: Applied Materials®
Model: Centura® 5200
Bulletin Number: BO-202
Vintage: 1998
Specification: Serial Number: X018
Wafer Size: 200mm

Centura System Includes:
System Controller Rack
Seriplex Gas Panel
Steelhead Heat Exchanger
Neslab HX-150 Chiller
Monitor/Light pen (1-TTW, 1-Remote Cart)
Front Panel (Painted)
Narrowbody Loadlocks w/ Tilt-out
HP Robotics

Centura Mainframe Configuration:
Position A: 200mm WxZ Chamber
Position B: 200mm HeWeB Chamber
Position C: 200mm WxZ Chamber
Position D: 200mm WxZ Chamber
Position E: Muli-slot Cooldown
Position F: Orienter

WxZ Chamber Configuration:
Dual Gas Feed-thru
Lift Assembly
Pumping plate
ENI OEM12B3 Generator
RF Phase IV Match
Gas Lines
Dual Manometer: 1 Torr; 100 Torr
Slit Valve O-Rings
WxZ CPR Heater
Gas Configuration: (SEC 4400 MFCs) WF6 30 sccm, WF6 200 sccm; (Unit 1660) NF3 150 sccm, H2 2 slm, Qty 2 Ar 3 slm, N2 300 sccm, H2 500 sccm; (Tylan) SIH4 30 sccm

HeWeB Chamber Configuration:
Etchback Lid
Electro Static Chuck
Ebara ET300W Turbo Pump with controller
Cathode
Magnet Driver
ENI OEM12B3 Generator
Water Box
Gate Valve
Gas Configuration: (Unit 166 MFCs) N2 300 sccm, Ar 200 sccm, SF6 300 sccm

© OEM Surplus, Inc.
Tel: 480-609-8565 Toll Free: (800) 686-4381
Applied Materials® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Endura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Centura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Mattson® is a trademark or registered trademark of Mattson in the U.S. and other countries.