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Applied Materials® Centura® 5200 (2x WxZ, 2x HeWeB)
Make: Applied Materials®
Model: Centura® 5200
Bulletin Number: BO-200
Vintage: 1996
Specification: Serial Number: 1001
Wafer Size: 200mm

Chamber A: WxZ with CPR Heater
Chamber B: WxZ with CPR Heater
Chamber C: HeWeB (MxP with ESC and Gatevalve)
Chamber D: HeWeB (MxP with ESC and Gatevalve)
Chamber E: Multi Slot Cooldown
Chamber F: Orienter

Controller Type: VME
Software Revision: E3.0
Interface Type: SECS, RS-232
Process Gases: WF6, SiH4, H2, SF6, NF3, Ar, N2, He
External Cooling: Water Cooled
Neslab Steelhead 0
Neslab HX-150
Gas Cabinet for WF6
Power: 208V, 50/60 Hz, 3 Phase

© OEM Surplus, Inc.
Tel: 480-609-8565 Toll Free: (800) 686-4381
Applied Materials® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Endura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Centura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Mattson® is a trademark or registered trademark of Mattson in the U.S. and other countries.