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Applied Materials® Endura® 5500 (1x Ti, 1x TiN, 2x Al)
Make: Applied Materials®
Model: Endura® 5500
Bulletin Number: BO-181
Vintage:
Specification: 2 Systems Available

Wafer Size: 200mm
Cleanroom Interface: Endura HP Front panel
PVD Endura Type controller
101 Pedestal Type
Lift options: HP motorized lift

Chamber 1: Titanium PVD
PVD Chamber Body: Standard PVD chamber
Magnet
PVD UHV Pump Option: CTI Fast Regen Cryo Single-Phase
PVD Pressure Control Option: 2 Position Gauge Valve
Cryo Restrictor
PVD Chamber Safety Option: EMO On Source Cover

Chamber 2: Ti-Nitride PVD
Widebody PVD Chamber
Magnet
CTI Fast Regen Cryo Single-Phase
PVD Wafer Chuck Option: Unclamped
PVD Pressure Control Option: 2 Position Gate Valve
Cryo Restrictors
PVD Chamber Safety Option: EMO On Source Cover

Chamber 3 & 4: Aluminum PVD
Standard PVD Chambers
Magnet
CTI Fast Regen Cryo Single Phase
PVD Wafer Chuck Options: Unclamped
PVD Pressure Control Option: 2 Position Gate Valve
Cryo Restrictors
PVD Chamber Safety Option: EMO On Source Cover

Chamber A: Passthru
Quartz Viewport lid

Chamber B: Cooldown with temperature monitor
Quartz viewport lid

Chamber C: Preclean Chamber
Reactive Preclean
Leybold TMP

Chamber F: Orienter
Orienter with standard degas

Robots:
Transfer: HP
Buffer: HP
Blade selection: Original metal blade

© OEM Surplus, Inc.
Tel: 480-609-8565 Toll Free: (800) 686-4381
Applied Materials® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Endura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Centura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Mattson® is a trademark or registered trademark of Mattson in the U.S. and other countries.