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Applied Materials® P5000 SACVD


Make: Applied Materials®
Model: P5000
Bulletin Number: BO-180
Vintage:
Specification: System Configuration:
Wafer Size: 200mm
8 slot elevator
DTLR cabinet for TEOS

3 lamp heated CVD chambers
SACVD TEOS
SACVD TEOS with low Frequency
CVD Nitride with low Frequency

Delta RF rack configuration
AMAT1 heat exchanger
Ozone generator rack with O3 generators and monitor


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Tel: 480-609-8565 Toll Free: (800) 686-4381
Applied Materials® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Endura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Centura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Mattson® is a trademark or registered trademark of Mattson in the U.S. and other countries.