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Applied Materials® Centura® 5200 4 Chamber DxZ TEOS
Make: Applied Materials®
Model: Centura® 5200
Bulletin Number: BO-179
Vintage:
Specification: Centura Includes:
Centura mainframe
208 Vac, 400 Amp, 60 Hz (BF)
Basic Centura system modules
System controller rack
Seriplex Gas Panel
PLIS Liquid Source
HP Robotics
Narrow Body Tilt Out Loadlocks
Wafer Sensors:  Cassette Present
On The Fly Center Finder
AMAT1 Heat Exchanger
Standard VME Rack
Turn to Release EMO
Monitor/light pen (1-TTW, 1-remote cart)
Front panel (painted)
50’ Standard Umbilicals, 75' pump frame umbilicals

Centura Mainframe Configuration:
Position A: 200mm DxZ USG TEOS Chamber
Position B: 200mm DxZ USG TEOS Chamber
Position C: 200mm DxZ USG TEOS Chamber
Position D: 200mm DxZ USG TEOS Chamber
Position E: Multi-Slot Cooldown
Position F: Blank

DxZ Chamber Configuration:
Chamber Process:  USG TEOS
TEOS (standard Aluminum Heater assembly)
Chamber Clamps
Process Kit:  Customer Supplied
Manometer Config:  Dual
Manometer 1:  20 Torr
Manometer 2:  1000 Torr
Slit Valve O-Ring:  Chemraz
Chamber O-Rings:  Chemraz
Lid Type:  Dual Gas Feed-Thru
Throttle Valve: Belt Drive
HF Generator:  AE RFG 2000-2v
RF Match:  Advanced Energy Model #3155094-003
© OEM Surplus, Inc.
Tel: 480-609-8565 Toll Free: (800) 686-4381
Applied Materials® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Endura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Centura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Mattson® is a trademark or registered trademark of Mattson in the U.S. and other countries.