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Mattson® Aspen II Dual ICP
Two Dual Wafer ICP Chambers With One Cooldown Chamber
Make: Mattson®
Model: Aspen II
Bulletin Number: BO-169
Vintage: Remanufactured
Specification: Standard Configuration Includes:
Aspen II Standard Mainframe
Configured 8” both sides
One (1) Operator Interface Keypad and Monitor
One (1) Engineering Keyboard and Monitor
New style slit doors
ACX 3201 Pressure controller
Watlow 988 temperature controller
Adjustable paddle robot
One (1) Generator Rack
Four (4) RFPP RS10S Generators/ RF cables 60’ length
Four (4) Trazar Match Networks AMU-1D (or newer)
Eight (8) Unit Millipore/Tylan 2900M MFC’s - each chamber as follows.
Oxygen 5000sccm
CF4 100sccm
N2 1000sccm (N2H2 – 4%)
N2 1000sccm
One (1) Standard Mattson Robot
15" or 26" cassette chamber lift
ICP circular groove heater block
Top plate w/ quartz tubes
Fluorosilicon Orings
Bottom Feed Gas Piping
Top feed exhaust
Nupro bellows and valves
KF50 vacuum connections
Std 10 torr manometer
100 torr Load lock manometer
1000 torr Shuttle manometer
4 light signal tower
One Set Painted Cover Panels including cool down chamber
Shower head configuration – extended guide rings
SECS capability
Shrouded EMO’s
Rapid Cassette Exchange option (Crossover Valve)

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Tel: 480-609-8565 Toll Free: (800) 686-4381
Applied Materials® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Endura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Centura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Mattson® is a trademark or registered trademark of Mattson in the U.S. and other countries.