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Applied Materials® Centura® 5200 2 Chamber HDP-CVD
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| Make: |
Applied Materials® |
| Model: |
Centura® 5200 |
| Bulletin Number: |
BO-164 |
| Vintage: |
1999 |
| Specification: |
S/N: 308467
Wafer Size: 200mm
Vintage: 2001
Condition: Excellent
System Configuration:
Centura Phase II Mainframe
System Power: 208 VAC, 400 Amp, 60Hz
Gas Panel Facilities: Top Feed Multi Line
Gas Panel Exhaust: Top Feed
Gas Panel Type: UHP
Standard Gas Lines
Narrow Body Tilt Out Loadlocks
Loadlock Slit Valves: Viton
Heat Exchanger: SMC (qty. 2)
Multi-Slot Cooldown
Orienter
HP Robot
200mm HDP-CVD Chamber Configuration:
Chamber Process: CVD
Lid Type: Ultima
Throttle Valve: Standard
LF & HF Generators: ETO
RF Match: Standard
Ceramic ESC
Turbo Pump: Seiko Seiki
Manometer 1: 100 mTorr
Manometer 2: 10 Torr
Slit Valve O-Ring: Chemraz
Chamber O-Rings: Chemraz
Gas Configuration:
Gas 1: O2, 100 sccm
Gas 2: SiH4, 100 sccm
Gas 3: Ar, 100 sccm
Gas 4: SiH4, 100 sccm
Gas 5: Ar, 100 sccm
Gas 6: NF3, 3 slm
Gas 7: Ar, 3 slm
Gas 8: O2, 100 sccm |
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© OEM Surplus, Inc.
Tel: 480-609-8565 Toll Free: (800) 686-4381
Applied Materials® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Endura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Centura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Mattson® is a trademark or registered trademark of Mattson in the U.S. and other countries.
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