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Applied Materials® Endura® 5500 (1x Vectra IMP TiN, 2x CVD TiN)
Make: Applied Materials®
Model: Endura® 5500
Bulletin Number: BO-161
Vintage: 1998
Specification: Wafer Size: 200mm
Position 1: Vectra IMP TiNitride Chamber
Position 2: CVD TiN (TxZ) Chamber
Position 3: CVD TiN (TxZ) Chamber
Position A: Pass-Thru
Position B: Cool Down
Position C: Preclean II w/Leybold Turbo
Position D: Preclean II w/Leybold Turbo
Position E: Orienter/Degas
Position F: Orienter/Degas

Chamber Configuration:
Position 1: Wide Body TiNitride:
Process: Vectra IMP TiNitride
Wafer Chuck: Unclamped
Application Pressure: Low
UHV Pump Options: Enhanced Low Vibration
Power Supply (kw): 12 KW
Pedestal: A101
Pedestal Material: SST
Cryo Gate Valve: 3PGV
Cryo Restrictor: Standard
Cryo Plate Standoffs
Shutter: Linkage
Chamber Lid Clamp Lever Extension
Target Water Flow Interlock
Wafer Bias Power Supply: 13.56 MHz
RF Match Type: .015 uF
IMP Process Kit Version: 4.5 Nitronics
Source Type: Vectra IMP
Source Adapter: Vectra IMP
Target Type: D-Bond
Target Thickness: 0.25"
Magnet Type: RH-2
Magnet Part No.: 0010-21676
Magnet Shim Thickness: 0.75 mm
Pedestal Part No.: 0240-27813
101 Pedestal Buttons Part No.: 0021-20437
Position 2: CVD TiN
Process Type: CVD TiN TxZ
Slit Valve Doors: Duraseal
Lid Assembly: Standard Lid
CVD TiN Outer Shield with Window
TxZ Heater
Position 3: CVD TiN
Process Type: CVD TiN TxZ
Slit Valve Doors: Duraseal
Lid Assembly: Standard Lid
CVD TiN Outer Shield with Window
TxZ Heater
Position A: Pass Thru
Additional Lid: Quartz
Position B: Standard Cooldown
Additional Lid: Quartz
Pedestal Type: Clean Cool
Position C: Preclean II
Leybold Turbo Pump
PCII UHV Pump: p/n 0223-20641
PCII Pedestal Material: Titanium
PCII RF Match Cable Length: 50'
PCII: PIK II
Position D: Preclean II
Leybold Turbo Pump
PCII UHV Pump: p/n 0223-20641
PCII Pedestal Material: Titanium
PCII RF Match Cable Length: 50'
PCII: PIK II
Position E: Orienter/Degas
Position F: Orienter/Degas
Loadlocks: Narrow Body
Robots:
Transfer Robot Type: VHP
Buffer Robot Type: HP

© OEM Surplus, Inc.
Tel: 480-609-8565 Toll Free: (800) 686-4381
Applied Materials® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Endura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Centura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Mattson® is a trademark or registered trademark of Mattson in the U.S. and other countries.