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Applied Materials® Centura® 5200 2 Chamber RTP
Make: Applied Materials®
Model: Centura® 5200
Bulletin Number: BO-159
Vintage:
Specification: Centura 5200 RTP Mainframe Includes:
Wafer Size: 200mm
Position A: MOD1 Chamber, POR2 Probe
Position B: MOD1 Chamber, POR2 Probe
Cooldown/Centerfinder Chamber Single Slot Contact
Dual Narrow Body Load Lock with Tilt-out Cassette
Processes: RTP BPSG/LD/Anneal/SD
Non-toxic gas panel
MFC Type: STEC 4400 (qty 4)
Hi Flow Regulators and Transducers with displays (60 psi) (qty 4)
Individual Gas Line Lock-out Tag-out
Lamp Power Limiter (Safe Lamp Check)
Process Pressure Matching Loadlock Kit
Multi Channel Optical Fiber Thermometer High Temperature Measurement System
Centura HP Robot
24V DC Power Supply
Cassette Configuration: Empak XT200-04
Water Leak Sensor Kit
Turn To Release EMOs
Chamber Lockout of Hazardous Energy
Remote AC Box:
700 A Remote Frame Current Capacity
208V AC 3-Phase Delta Power
GE 480V/208V, 800A Transformer
Software: GEM/SECS Interface

© OEM Surplus, Inc.
Tel: 480-609-8565 Toll Free: (800) 686-4381
Applied Materials® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Endura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Centura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Mattson® is a trademark or registered trademark of Mattson in the U.S. and other countries.