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Applied Materials® DPS® Metal Chamber
Make: Applied Materials®
Model: Centura® 5200
Bulletin Number: BO-112
Vintage:
Specification: Wafer Size: 150 mm
Description:
DPS R1 Metal Etch
Seriplex gas panel
Phase II Centura chamber Tray
Phase II Centura backside Helium tray
Extra process kit
Polymide ESC 6” flat
Ultra Pure Gas Pallet (Seriplex):
CL2
BCL3
Ar
N2 low flow
N2 flow gold standard
Heated gas lines
Heated forelines
Heated Seiko Seiki 1303 Turbo
Gas lines included for CH B position
Coolant flow meter, valves and hoses included
System Electronics Circuit boards included
Breakers and contactors for Lamp drivers/ chamber Tray A/C power
Dome Lamp Driver included

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Tel: 480-609-8565 Toll Free: (800) 686-4381
Applied Materials® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Endura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Centura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Mattson® is a trademark or registered trademark of Mattson in the U.S. and other countries.