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Applied Materials® 4 Chamber P5000
Make: Applied Materials®
Model: Centura® P5000
Bulletin Number: BO-111
Vintage:
Specification: Wafer Size: 100mm
System Includes:
Mainframe: Mark II
System Power: 208 Vac, 3 phase, 400 Amp, 60 Hz
VME: Extended (21 slot)
Fab Installation: TTW
Heat Exchanger Type 1: AMAT 1
Heat Exchanger Type 2: Neslab
Standard Gas panel Purity
Expanded 28-line Gas panel
Liquid Deliver: PLIS
LF RF Generator: Astech
HF RF Generator: ENI 12B
CVD RF Match: Phase 4 – CVD
Etch RF Match: Phase 4
Fab Monitor: TTW
Chase Monitor
Chamber A:
Chamber A Type: PECVD
Susceptor Type: TEOS
Chamber A Process: USG TEOS
Process Kit: Undoped TEOS
Process Kit Size: 100mm Flat
Throttle Valve Type: Dual Spring
Chamber B:
Chamber B Type: PECVD
Susceptor Type: Silane
Chamber B Process: Si USG
Process Kit Size: 100mm Flat
CVGFT Lid Type: Single Gas Feed-Thru
Throttle Valve Type: Dual Spring
Chamber C:
Chamber C Type: Etch
Turbo Pump: Leybold Mag 400
Endpoint System
Process Kit Size: 100mm Flat
CVGFT Lid Type: Single Gas Feed-thru
Throttle Valve Type: Direct Drive
Chamber D:
Chamber D Type: PECVD
Susceptor Type: Silane
Chamber D Process: Si USG
Process Kit Size: 100mm Flat
CVGFT Lid Type: Single Gas Feed-thru
Throttle Valve Type: Dual Spring

© OEM Surplus, Inc.
Tel: 480-609-8565 Toll Free: (800) 686-4381
Applied Materials® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Endura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Centura® is a trademark or registered trademark of Applied Materials, Inc. in the U.S. and other countries. Mattson® is a trademark or registered trademark of Mattson in the U.S. and other countries.